| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma display and its manufacturing method with high reliability and a longer life. SOLUTION: The member for a plasma display with a MgO film on a plurality of electrodes on a substrate has density of the MgO film of 3.2 g/cm3 and over. In the manufacturing method for the member for the plasma display and the plasma display formed with MgO film on a plurality electrodes on the substrate, impurity level I in the decompression atmosphere which is calculated by the following formula is 110 ppm and under after the substrate is disposed in a vacuum chamber and discharged of air in advance, in forming the MgO film on a plurality of electrodes on the substrate in the decompression atmosphere with the introducing gas. I= (Qb+Qimp)/Qgas, where, Qb: build up rate of the vacuum chamber, Qimp: quantity of impurity composition in the introducing gas at a gas inlet port of the vacuum chamber, Qgas: introducing gas mass flow. Each unit is Pa.m3/s.
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