| 摘要 |
PROBLEM TO BE SOLVED: To provide the characteristic of a confocal scanning type microscope design in which a high signal output and a high ratio between a signal and a noise are realized with a simple means. SOLUTION: In a microscope design for a confocal scanning type microscope having a light source 1 to irradiate an object 6 which is an inspection object specially by using exciting light 2 and at least two detection channels 8 and 9 indicating formed detection light, at least two detection channels are optically superposed by superposing devices 11, 12, 13, 15, 17 and 18 with respect to the high signal output and the high ratio between the signal and the noise.
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