APPARATUS FOR RECLAIMING FAILED ORGANIC ELECTRO-LUMINESCENCE DEVICE

摘要

PURPOSE: An apparatus for reclaiming a failed organic electro-luminescence device is to reclaim the failed organic electro-luminescence device, thereby reducing fabricating cost, and also change the method according to failing reason. CONSTITUTION: A failed organic electro-luminescence panel is detected and then conveyed to a desired portion. A stacked layer is removed from the conveyed panel. A plurality of organic thin films are formed on the panel of which the stacked layer is removed. A metal electrode layer is formed on the organic thin film. A passivation layer is formed thereon. Additionally, a surface cleaning process and a surface treating process are performed at the panel of which the stacked layer is removed. In a process of removing the stacked layer of the failed panel, the plurality of stacked layers are removed by a wet-etching process using chemicals or a dry-etching process using gas.