| 摘要 |
<p>PROBLEM TO BE SOLVED: To surely peel a sheet stuck on a platelike member without stretching and tearing it. SOLUTION: As to a protective sheet F stuck on a wafer W, while using a a predetermined length of adhesive tape T, the tape T is adhered to the end section of the sheet F, and the sheet F is peeled by pulling the adhesive tape T. In peeling the sheet F, with a guide roller 601 abutting on the sheet F and the position of the roller 601 kept fixed, a peeling head section 400 and a table 203 are made to move in the directions opposed to each other for peeling the sheet F.</p> |
