| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a simple, space-saving and high-precision stage drive mechanism. SOLUTION: The rotation of an X motor 9 and a Y motor 20 is taken up by means of a slanted central shaft 2a. An X ball screw 7 is rotated directly by means of an X belt 11, and a Y ball screw 29 is rotated via a belt 25, a spline shaft 27, a bevel gear 28a and a bevel gear 28b with built-in spline mechanism.</p> |
