PHOTOELECTRIC CONVERSION DEVICE, ITS MANUFACTURING METHOD, AND ITS MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a photoelectric conversion device whose generating efficiency is not lowered. SOLUTION: The photoelectric conversion device has a silicon substrate 1 having a light receiving surface, an n-type diffusion layer 5, and electrodes formed on the light receiving surface. Grooves 9 are formed on the light receiving surface. The electrodes include wiring-oriented electrodes having relatively wide widths to grid electrodes 72, and the grid electrodes 72 which have relatively narrow widths to the wiring-oriented electrodes and are connected electrically with the wiring-oriented electrodes. The grid electrodes 72 are formed in the regions wherein the grooves 9 are not formed.