| 摘要 |
PROBLEM TO BE SOLVED: To eliminate an influence of disturbed air flow due to a heat produced in a reaction furnace within a processing chamber and to prevent in advance an adhesion of dust to the surface of a wafer. SOLUTION: A boat 30 is transferred by a boat transfer means 20, between a first waiting position 34 to allow a processed boat 30 to wait and a second waiting position 36 to allow another boat 30 for the next processing to wait. The first and second waiting positions 34 and 36 are located on the upstream side of a clean air from an HEPA filter, and the transfer means 20 is arranged on the downstream side thereof. |
