发明名称 Forming thin coating for manufacturing semiconducting components involves applying coating to material resistant to melting temperature or cover of material to coating before melting
摘要 The method involves applying a material to a bearer to form a coating, e.g. by deposition, melting the coating and cooling to crystallize it. The coating is applied to a material resistant to the melting temperature or a cover of the material is applied to the coating before melting. The material is chemically inert relative to the coating material and/or an oxide layer is formed between the coating and cover at least during crystallization.
申请公布号 DE10005484(A1) 申请公布日期 2001.08.16
申请号 DE2000105484 申请日期 2000.02.08
申请人 ANGEWANDTE SOLARENERGIE - ASE GMBH 发明人 BUSS, WERNER
分类号 H01L21/20;(IPC1-7):H01L21/20;H01L31/18;H01L21/324;H01L31/039;H01L31/036 主分类号 H01L21/20
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