| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming an illumination intensity correcting filter, capable of preventing loosening of a photosensitive coating film on the quartz glass and forming a light-shielding part of a prescribed pattern with a high accuracy. SOLUTION: The method of forming an illumination intensity correcting filter comprises (b) a process for forming the first coating film 2A which contains a photosensitive resin to a base surface 1a, (c) a process for forming a second coating film 2B, a process for drying the first and second coating films to form a photosensitive coating film 2, (f) a process for exposing and developing the photosensitive coating film, and eliminating a part of the photosensitive coating film 2b, (g) a process for coating carbon slurry, (h) a process for drying and curing the carbon slurry, and (i) a process for reversally developing the carbon slurry to form a light-shielding part.
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