| 发明名称 |
CAPACITOR HAVING TANTALUM OXYNITRIDE FILM AND METHOD FOR MAKING SAME |
| 摘要 |
A capacitor has a tantalum oxynitride film. One method for making the film comprises forming a bottom plate electrode and then forming a tantalum oxide film on the bottom plate electrode. Nitrogen is introduced to form a tantalum oxynitride film. A top plate electrode is formed on the tantalum oxynitride film.
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| 申请公布号 |
US2001011740(A1) |
申请公布日期 |
2001.08.09 |
| 申请号 |
US19980031526 |
申请日期 |
1998.02.26 |
| 申请人 |
|
发明人 |
DEBOER SCOTT JEFFREY;AL-SHAREEF HUSAM N.;THAKUR RANDHIR P.S.;GEALY DAN |
| 分类号 |
H01L21/02;H01L21/316;H01L21/8242;(IPC1-7):H01L21/824;H01L21/20;H01L31/119 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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