发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a reliable semiconductor device, having wiring whose main component is copper. SOLUTION: In the semiconductor device with wiring whose main component is copper, the wiring is made to contain copper dioxide.
申请公布号 JP2001210641(A) 申请公布日期 2001.08.03
申请号 JP20000024692 申请日期 2000.01.28
申请人 HITACHI LTD 发明人 KUMAGAI YUKIHIRO;MIURA HIDEO
分类号 H01L21/3205;H01L23/52;(IPC1-7):H01L21/320 主分类号 H01L21/3205
代理机构 代理人
主权项
地址