| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared ray sensor of stable element structure by inserting an adhesion layer between an antimony thin-film and a base material layer formed on the surface of a substrate, which constituting a thin-film thermo couple, for improved adhesion. SOLUTION: In this infrared sensor, incident infrared ray is converted into heat, and the temperature change caused by the heat is detected with a thin-film thermo couple. Here, one of a thermoelectric thin film is an antimony thin film 5, and a thin film 9 comprising any of titanium, nickel, or aluminum is inserted between the antimony thin film 5 and a base material layer 4 formed on the surface of a sensor substrate 1.
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