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发明名称
Tantalamidvorläufer zum Aufbringen von Tantalnitrid auf einem Substrat
摘要
申请公布号
DE19982730(T1)
申请公布日期
2001.07.26
申请号
DE1999182730T
申请日期
1999.01.21
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
BAUM, THOMAS H.;BHANDARI, GAUTNAM
分类号
C07F9/00;C23C14/06;C23C14/48;C23C16/18;C23C16/30;C23C16/34;C30B25/02;C30B25/10
主分类号
C07F9/00
代理机构
代理人
主权项
地址
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