| 摘要 |
PURPOSE: An abrasive for metal which comprises particle having a functional group capable of trapping a metal ion, a process for producing the abrasive, and a polishing composition comprising the abrasive, an oxidizing agent and water, are provided. CONSTITUTION: The functional group is at least one selected from the group consisting of Oxygen atom, Nitrogen atom, Sulfur atom, Phosphorous atom, Arsenic atom and Selenium atom. The functional group capable of trapping a metal ion is at least one selected from the group consisting of -OH, -COOM, >C=O, -O-, -COOR, -CONH2, -NO, -NO2, formula(1), -SO3M, -PHO(OM), -PO(OM)2, -AsO(OM)2, -NH2, >NH, formula(2), -N=N-, >C=N-, >C=N-OH, >C=NH, -SCN, -SH, -S-, >C=S, -COSM, -CSSM, -CSNH2, -NCS, >P-, >As-, -SeH, >S=Se and -CSeSeM, wherein M represents hydrogen, an alkali metal, an alkaline earth metal or an ammonium group and R represents a hydrocarbon. |
