| 摘要 |
This invention provides an EDS detector in which even if connecting pipes vibrate due to gas flow, such vibration will not be transferred to a cryostat side and in which a small-sized gas-circulation-type refrigerator is provided in the cryostat sliding in a given direction, helium gas is supplied through the connecting pipes to the refrigerator, and an x-ray detecting element is cooled by means of the refrigerator. In connecting pipes, a connecting pipe body portion is connected to a pressure-converting value unit which is fixedly held in a vibration-proofing stand. Additionally, weights can be selectively applied to a flexible connecting pipe to further dampen vibrations.
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