| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of realizing a pattern transfer by an imprinting process at a low cost and at the same time, make available a high productivity pattern transfer device which has no longer such a shortcoming in production that temperature fluctuations ensue in the imprinting process, through solving this conventional problem. SOLUTION: An actively rotating cylindrical mold member 6 having irregularities of a pattern shape formed on the circumferential face, is installed, in a freely ascending/descending manner, on a plate 3 on which a substrate 2 is fixedly disposed. Further, a heating means is provided on the plate 3 or the mold member 6 and a mechanism for controlling a load to be pressed to the substrate 2 is mounted on the mold member 6. The pattern transfer is achieved by pressing the mold member 6 to the substrate 2 on the plate 3 while rotating the mold member 6 and moving the mold member 6 or the plate 3 in parallel.
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