| 摘要 |
PURPOSE: A system for controlling a semiconductor manufacturing process is provided to manage each process in a central manner by transmitting and receiving collected data to and from a main server. CONSTITUTION: A plurality of semiconductor equipment(10,10') allow respective processes to be preformed therein. A transmitting and receiving apparatus(20,20') transmits and receives analogue and digital data which are collected in each process of the semiconductor equipments(10,10'). A unit programmable logic controller(30,30',30'') processes the data transmitted and received in each process. A master programmable logic controller(40) controls a signal output from the unit programmable logic controller(30,30',30'') as a whole. A main server(50,50',50'') makes the signal output from the master programmable logic controller(40) as a database, reads the same and controls the each process. The main server(50,50',50'') is connected to the master programmable logic controller(40) with Ethernet which is a LAN medium connection control technology, whereby data can be transmitted and received in two ways.
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