发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To improve integration of a semiconductor device with a ferroelectric memory by laminating a ferroelectric memory region not effected by a leakage current above a logic circuit region, and by increasing the integration of the memory without malfunctions. SOLUTION: This semiconductor device is equipped with a semiconductor substrate 300, where a logic circuit region having a bit line drive transistor is formed, an interconnection wiring that is formed on the logic circuit region for electrically connecting to the bit line drive transistor, a bit line 330 formed above the interconnection wiring for electrically connecting to the interconnection wiring, a silicon film 350 that is formed above the bit line for limiting a cell formation region, and a capacitor 380 formed on the silicon film, a transistor region composed of gate, source, and drain electrodes 368, 362, and 364, and the transistor for electrically connecting to the source electrode.
申请公布号 JP2001196552(A) 申请公布日期 2001.07.19
申请号 JP20000373643 申请日期 2000.12.08
申请人 TOBU DENSHI KK 发明人 KIM JAE-KAP
分类号 H01L27/10;H01L21/02;H01L21/8242;H01L21/8246;H01L27/06;H01L27/105;H01L27/12;(IPC1-7):H01L27/105 主分类号 H01L27/10
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