发明名称 MEASURING APPARATUS FOR POSITION ADJUSTMENT
摘要 <p>PROBLEM TO BE SOLVED: To provide a measuring apparatus for position adjustments that is capable of adjusting the amount by which the positions of component parts or mechanisms move relative to each other during assembly of the apparatus or the like. SOLUTION: A part to be measured has a light reflecting surface formed at right angles to a member having a copying part for the part to be measured. The reflecting surface of the part to be measured comprises a reflecting surface made by a plane and an inclined reflecting surface provided to extend vertically from the center of the plane. A measuring part includes a detecting means and an opening through which the reflecting surface of the part to be measured passes, with the detecting means having an optical means for applying light to the reflecting surface of the part to be measured which is located above the opening in the measuring part, and a deviation detecting means receiving the light reflected from the reflecting surface of the part to be measured and detecting the amount of deviation from a predetermined reference to a light receiving position.</p>
申请公布号 JP2001194111(A) 申请公布日期 2001.07.19
申请号 JP20000004021 申请日期 2000.01.12
申请人 KAIJO CORP 发明人 SUGIYAMA SHOKICHI;ITAKURA JUNICHI
分类号 H01L21/68;G01B11/00;(IPC1-7):G01B11/00 主分类号 H01L21/68
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