| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe scanning apparatus capable of settling the heat shrinkage of a thick pipe part, an inner cylinder and viscous matter early enough to start the measurement of the surface of a sample in its early stages. SOLUTION: The coefficient of thermal expansion of the thick pipe part 15 is made larger than that of the inner cylinder 13 and the coefficient of thermal expansion of the viscous matter 17 is made larger than that of the thick pipe part. When the thick pipe part 15 is heated at the time of approach by a heating coil 16 to set the temperature of the viscous matter to coarse adjustment temperature, the gap between the thick pipe part 15 and the inner cylinder 13 is widened by the difference between the coefficients of thermal expansion of the thick pipe part 15 and the inner cylinder 13. Therefore, even if the coarse adjustment temperature is made lower than before, a coarse adjustment speed can be made equal to a conventional one. As a result, a difference between the coarse adjustment temperature and preheating temperature can be made smaller than before and a z-heat drift time can be shortened than before and the observation of a sample can be started in its early stages.
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