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发明名称
METHOD AND DEVICE FOR PRE-TREATMENT OF SUBSTRATES
摘要
申请公布号
EP0867036(B1)
申请公布日期
2001.07.18
申请号
EP19960939061
申请日期
1996.11.15
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER
发明人
GOEDICKE, KLAUS;FIETZKE, FRED;RESCHKE, JONATHAN;HEMPEL, WOLFGANG;SCHEFFEL, BERT;METZNER, CHRISTOPH;SCHILLER, SIEGFRIED
分类号
C23C14/02;H01J37/32;(IPC1-7):H01J37/32;C23C14/35
主分类号
C23C14/02
代理机构
代理人
主权项
地址
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