| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that the etching effect is low in a method to etch a substrate with Ar ions and then coat the substrate with an amorphous carbon film and such a problem that practical adhesive strength is not obtained when an amorphous carbon-coated member is used as a mechanical part, a cutting tool or a metallic mold even in a method to form an intermediate layer between the substrate and the amorphous carbon film. SOLUTION: Gas ions in an atmospheric gas containing at least one or more gases selected from Kr, Xe, CH4, C2H2, C2H4, C6H6 and CF4, one or more element ions selected from the elements of group IIIa, group IVa, group Va, group VIa, group IIIb and group IVb of the periodic table or plural combinations of the gas ions and the element ions are emitted to the surface of the substrate while bias voltage is impressed to the substrate and then the substrate is coated with the amorphous carbon film. |
