发明名称 |
Anordnung zur Messung von Beschleunigungen |
摘要 |
The arrangement consists of at least two individual sensors (2a-d) on a common substrate each with a principal sensitivity axis. Each sensor has a cantilevered paddle (3a-d) connected to a transverse beam (4a-d) with a centre of gravity (Sa,Sb,Sc) as a seismic mass. Each transverse beam has means for measuring the deflection of the seismic mass and are arranged in parallel with the surface of the substrate. The principal sensitivity axes of each individual sensor has a displacement angle ( alpha ) to the normals of the substrate surface. |
申请公布号 |
DE19649715(C2) |
申请公布日期 |
2001.07.12 |
申请号 |
DE1996149715 |
申请日期 |
1996.11.30 |
申请人 |
TEMIC TELEFUNKEN MICROELECTRONIC GMBH;DAIMLERCHRYSLER AG |
发明人 |
PRECHTEL, ULRICH;SCHALK, JOSEF;SEIDEL, HELMUT |
分类号 |
G01L5/16;G01P15/12;G01P15/18;(IPC1-7):G01P15/08;G01P15/09;G01P15/125 |
主分类号 |
G01L5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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