发明名称 |
ZINC SULFIDE-BASED SINTERING MATERIAL, PRODUCING METHOD THEREFOR, TARGET, THIN FILM AND OPTICAL RECORDING MEDIUM USING THIN FILM |
摘要 |
PURPOSE: A manufacturing method of ZnS-based sintered material is provided to improve excellent shaping property and to be used as a target for DC sputtering. CONSTITUTION: ZnS-based sintering material consists essentially of ZnS and contains niobium oxide. The sintering material is converted into a ZnS-based sintered compact and is used for a sputtering target by regulating the content of niobium oxide to 10-50wt% expressed in terms of Nb2O5 and by regulating the surface resistivity thereof to 10Omega/square surface. The target of the sintered compact can be utilized for DC sputtering having a high thin-film forming rate. The sintered compact is obtained by preparing a mixture of ZnS powder having an average particle diameter of 0.5-20 micrometers with niobium oxide powder having an average particle diameter of 5 micrometers, by hot pressing the resultant mixture at 800-1100deg.C and by providing the sintered compact of a desired shape.
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申请公布号 |
KR20010062782(A) |
申请公布日期 |
2001.07.07 |
申请号 |
KR20000083106 |
申请日期 |
2000.12.27 |
申请人 |
FURUYA METAL CO., LTD.;KYOCERA CORPORATION |
发明人 |
NOGUCHI YUKIO;UENO TAKASHI |
分类号 |
G11B7/24;C04B35/547;C23C14/06;C23C14/34;G11B7/243;G11B7/254;G11B7/257;G11B7/2578;(IPC1-7):G11B7/24 |
主分类号 |
G11B7/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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