| 摘要 |
PURPOSE: A gas cabinet containing a manual valve is provided to supply CDA(Clean Dry Air) to a fault valve of PLC CPU(Program Logic Controller Central Processing Unit). CONSTITUTION: A gas cabinet comprises a PLC CPU(12) controlling supply of CDA; gas cylinders(14,16) containing gas; a discharge hole discharging the gas; and a vacuum generator(20) absorbing the gas in a gas line. The PLC CPU decides opening of the valve by supplying the CDA to the valve of the gas cabinet. The gas cylinders contain the specific gas by compressing. The vacuum generator absorbs nitrogen and the gas contained in the gas line to discharge the gas via the discharge hole. A CDA supply unit is mounted on a front end of the PLC CPU to supply the CDA into a CDA manual supply line(22). A manual valve(V4) is formed on a middle portion of the CDA manual supply line, and opened in fault of the PLC CPU. Thereby, the gas cabinet contains the manual valve supply CDA in failure of PLC CPU to prevent fault generated in isolating the gas while TFT(Thin Film Transistor) producing process.
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