IMAGE SENSOR AND IMAGE SENSOR UNIT USING IT

摘要

PROBLEM TO BE SOLVED: To provide an image sensor which can convert optical signals from an original picture into electric signals with accuracy and an image sensor unit using the sensor. SOLUTION: The image sensor is constituted in such a way that a plurality of photoelectric conversion sections which generate electric charges correspondingly to the quantity of incident light and an electronic circuit which reads out electric signals from the photoelectric conversion sections are formed on one surface of a silicon substrate 12 and a protective coating film 11 composed at least of an almost transparent silicon oxide film 8 and an almost transparent silicon nitride film 9 laminated upon the film 8 is formed to cover the photoelectric conversion sections and electronic circuit. In addition, at least the silicon nitride film 9 has windows 10 for sensor which are formed by only removing fixed areas from the portions positioned on the photoelectric conversion sections of the film 9 so that the occurrence of sensitivity variation in the photoelectric conversion sections due to the thickness distribution of the coating film 11 may be suppressed.