发明名称 SKEW-ADJUSTING METHOD FOR SEMICONDUCTOR DEVICE TESTING DEVICE AND SKEW-ADJUSTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a skew-adjusting method capable of minimizing the effect of setting errors produced in skew adjustment on the test result of a semiconductor device. SOLUTION: According to this skew adjusting method, the phase of calibration pulses impressed on the pins of a socket mounted with a test object semiconductor device is measured by a phase measuring means to adjust a skew between the pins, An input pin of a clock given to the test object semiconductor device is selected as a phase reference pin for skew adjusting. The phases of signals impressed on the other pins are adjusted with the phase of the clock used as the reference, thereby distributing phase setting errors of the signals impressed on the other pins centering around the phase of the clock to prevent the setting errors from being biased toward the leading or lagging direction with respect to the phase of the clock.
申请公布号 JP2001183419(A) 申请公布日期 2001.07.06
申请号 JP19990370104 申请日期 1999.12.27
申请人 ADVANTEST CORP 发明人 IBANE TORU
分类号 G01R31/28;(IPC1-7):G01R31/28 主分类号 G01R31/28
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