STANDARD SAMPLE FOR MEASUREMENT OF FILM THICKNESS AND METHOD AND DEVICE FOR MEASUREMENT OF CARBON FILM THICKNESS BY USING THAT SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a standard sample for the measurement of film thickness which is to be used for the control of the film thickness of a carbon film and which does not cause degradation in the measurement accuracy caused by contamination with an organic substance in the measurement device. SOLUTION: The sample consists of a substrate having the carbon film on its surface the film thickness of which is to be measured and a masking layer having a surface free from contamination with an organic substance and formed on the carbon film.