发明名称 PROCEDE DE FORMATION D'UN MICRORELIEF CONCAVE DANS UN SUBSTRAT, ET MISE EN OEUVRE DU PROCEDE POUR LA REALISATION DE COMPOSANTS OPTIQUES
摘要 The invention concerns a method for making at least a concave relief (124, 145) in a substrate, comprising the following steps: forming at least a boss of flowable material (100), on the substrate (120), heating the flowable material at a temperature sufficient to cause said material to creep, and etching the substrate and the crept material to provide the substrate with a relief. The invention is characterised in that it consists in causing the crept material to be solidified into a state where it exhibits a concave relief.
申请公布号 FR2803396(A1) 申请公布日期 2001.07.06
申请号 FR19990016761 申请日期 1999.12.30
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 RABAROT MARC;MARTY JEAN
分类号 G02B3/00;B29D11/00;C03C15/00;(IPC1-7):G02B5/10 主分类号 G02B3/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利