MIXER FOR CHEMICALS AND MIXING METHOD THEREOF

摘要

PURPOSE: Provided are a mixer for chemicals for semiconductor device process and a mixing method thereof. The method is simplified as compared with conventional mixing process and decreases the area of a facility. CONSTITUTION: The mixer consists of the following parts: a mixing vessel (100) to store and mix raw liquid chemicals (A,B); transfer lines (102,104) connected from the mixing vessel (100); a supply line (106) for supplying mixed chemicals to a semiconductor manufacturing facility; and flow controllers (F/C1,F/C2) for controlling the quantity of chemicals equipped at the transfer lines (102,104). The mixing method proceeds to the following steps: measuring the quantity of transferred chemicals by using the flow controllers (F/C1,F/C2); transferring the raw liquid chemicals (A,B) to the mixing vessel (100) through the transfer lines (102,104); mixing the raw liquid chemicals of one or more kinds in the mixing vessel (100); and supplying the semiconductor manufacturing facility with the mixed liquid.