发明名称 Functional device unit and method of producing the same
摘要 An implementation base (10) is formed of a silicon substrate (11) having a recess (12) on a surface. Wire layers (13) are formed on the silicon substrate (11), continuously extending from the bottom of and via the side of the recess (12) to the top surface. A semiconductor chip (14) is implemented in the recess (12) of the implementation base (10) in a flip-chip manner to configure a functional device unit.
申请公布号 GB0111592(D0) 申请公布日期 2001.07.04
申请号 GB20010011592 申请日期 2001.05.11
申请人 MITUTOYO CORPORATION 发明人
分类号 H01L21/60;H01L23/13;H01L33/48;H01L33/62 主分类号 H01L21/60
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