OZONE TREATING DEVICE AND OZONE TREATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ozone treating device which is capable of increasing an ozone flow rate and applying an ozone treatment uniformly to the entire face of an object to be treated as well as an ozone treating method. SOLUTION: The ozone treating device 1 is equipped with an ozone supply pipe 8 for supplying ozone to the interior of a treatment chamber 3a and an exhaust pipe 14 connected to the treatment chamber 3a. The ozone supply pipe 8 is mounted on the side face of a manifold 3. The exhaust pipe 14 is connected to an exhaust opening 13 arranged opposite to the ozone supply pipe 8. The ozone is supplied from the ozone supply pipe 8 so that the ozone reaches the ceiling of a reaction pipe 2, and is supplied to a treatment region 3b by discharging gas from the interior of the treatment chamber 3a by means of a vacuum pump 16.