发明名称 Metal-alloy interconnections for integrated circuits
摘要 Novel metal-alloy interconnections for integrated circuits. The metalalloy interconnections of the present invention comprise a substantial portion of either copper or silver alloyed with a small amount of an additive having a low residual resistivity and solid solubility in either silver or copper such that the resultant electrical resistivity is less than 3muOMEGA-cm.
申请公布号 US6255733(B1) 申请公布日期 2001.07.03
申请号 US20000616113 申请日期 2000.07.13
申请人 INTEL CORPORATION 发明人 GARDNER DONALD S.
分类号 H01L23/532;(IPC1-7):H01L23/48 主分类号 H01L23/532
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