| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus that promptly lowers the temperature of a heating plate, while the infiltration of particles into a processing chamber and rise of the internal pressure of the processing chamber are prevented. SOLUTION: A heat treatment chamber S is formed by a cover body 64 covering a heating plate 51, and gas that generates hot atmosphere air flow is supplied through a supply port 71 into the heat treatment chamber S. At lowering the temperature of the heating plate 51, cooling gas is supplied from a plurality of nozzles 74 to the rear surface of the heating plate 51. A check- valve mechanism 90, that prevents the infiltration of the cooling gas into the heat treatment chambers S and allows discharge of the gas from the heat treatment chamber S, is provided to the outer peripheral side of the heating plate 51.
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