MICRO-MACHINED ANGLE-MEASURING GYROSCOPE

摘要

A micro-machined angle measurement gyroscope. In one implementation, the gyroscope (101) includes a substrate; a proof mass (106) coupled to the substrate (110) by an isotropic suspension (108) such that the proof mass can move in any direction in the plane of the substrate; a plurality of drive electrodes (210) configured to cause the proof mass to oscinate in the plane of the substrate; and a plurality of sense electrodes (212) configured to sense the motion of the proof mass in the plane of the substrate. In another implementation, the gyroscope includes a substrate; a proof mass suspended above the substrate by an isotropic suspension such that the proof mass can move in any direction in an oscillation plane normal to the substrate; a plurality of drive electrodes configured to cause the proof mass to oscillate in the oscillation plane; and a plurality of sense electrodes configured to sense the motion of the proof mass in the oscillation plane.