BOWL, SPIN, RINSE, AND DRY MODULE, AND METHOD FOR LOADING A SEMICONDUCTOR WAFER INTO A SPIN, RINSE, AND DRY MODULE

摘要

A bowl (102) includes a bottom wall (102a) having a generally circular shape. A sidewall (102b) extends upwardly from the bottom wall (102a) to define a cylindrical chamber (122). The sidewall (102b) has a projection (124) that extends into the cylindrical chamber (122). The projection (124) has a top surface (124a) that defines a step in the cylindrical chamber (122) and a sloped surface (124b) that extends between the top surface and an inner surface of the sidewall (102b). The top surface (124a) of the projection (124) is sloped slightly downwardly. The sloped surface (124b) of the projection (124) is oriented relative to the top surface (124a) such that extensions of the top surface and the sloped surface define an angle in a range from about 30 degrees to about 45 degrees. A spin, rinse, and dry module (100) including the bowl (102) and a method for loading a semiconductor wafer into a spin, rinse, and dry module also are described.