| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an ink jet head in which the characteristics of a driving board can be enhanced while preventing the yield from lowering. SOLUTION: The method for manufacturing an ink jet head comprising a silicon driving board 1 having pressure generating chambers 1b, driving element parts 2 formed thereon, and a drive IC chip for driving the driving element parts 2 comprises steps for preparing a silicon substrate 1 of 300μm thick or above, forming the driving element parts 2 on the surface side of the silicon substrate 1, making thin the silicon substrate 1 by polishing the rear side thereof, and forming the pressure generating chambers 1b by etching the rear side of the silicon substrate 1.
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