| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer presser of a wafer housing vessel wherein an upper edge part of the wafer is pressed for sure holding, with simple structure at low manufacturing cost. SOLUTION: Relating to a wafer presser member of a wafer housing vessel, at both end parts in width direction of a tip end part of an elastic piece 36, a pair of guide pieces 11a and 11b for guiding the upper edge are provided. At a place nearer a root side than the guide pieces 11a and 11b of elastic piece 36, a pair of engagement pieces 12a and 12b which, for pressing the upper edge of wafer W, comprise a slope inclined inward, respectively, are provided. To lower an upper lid to be attached to a vessel main body, firstly, the upper edge part of wafer W comes in between pair of guide pieces 11a and 11b of each elastic piece 36, so that the wafer W is, thanks to the slope, guided to move to an intermediate point between the pair of guide pieces 11a and 11b, thus the wafer W is, smoothly moved and held in the engagement groove between engagement pieces 12a and 12b for sure holding.</p> |
