| 摘要 |
<p>The invention relates to a method and a device for the plasma-assisted surface treatment of large-volume components. The component (1) is arranged in a vacuum chamber and the vacuum chamber (3) evacuated. The component (1) is connected to at least one resonant circuit (7) comprising a high-frequency generator (5), and the inductance and/or the capacitance of the resonant circuit (7) is adapted to the component (1). The high-frequency generator is switched on and the plasma ignited. At least one nitrogen oxide is introduced into the vacuum chamber (3) as a working gas and/or as a carrier gas. The reaction of the nitrogen oxide in the plasma burning on the surface of the component generates electromagnetic radiation and/or free electrons. To this end, the device is provided with a vacuum chamber (3), at least one resonant circuit (7) comprising a high-frequency generator (5), the capacitance and inductance of the resonant circuit (7) being adjustable, at least one connection (8) for connecting the resonant circuit (7) to the component (1), and a device (17) for introducing nitrogen oxide into the vacuum chamber (3).</p> |
