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发明名称
摘要
申请公布号
JP3178715(B2)
申请公布日期
2001.06.25
申请号
JP19900127410
申请日期
1990.05.17
申请人
发明人
分类号
H01L21/20;C30B29/06;H01L21/336;H01L21/84;H01L29/78;H01L29/786;(IPC1-7):C30B29/06
主分类号
H01L21/20
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代理人
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地址
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