发明名称 ELECTRONIC DEVICE HANDLER AND ELECTRONIC DEVICE INSPECTING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To eliminate the wiring of a heater wire to a contact hand and ensure stable heating of an inspection device through heating the device held by the contact hand and positioned at an inspection position in a noncontact manner. SOLUTION: An IC handler has the contact hand 1 for holding and positioning the IC 10 to the inspection position. An infrared ray irradiating device 8 for emitting infrared rays is arranged in the vicinity of the contact hand 1, in a state with the IC 10 positioned to the inspection position. A mirror 7 for changing the advance direction of infrared rays is incorporated in the contact hand 1. Infrared rays from the infrared irradiating device 8 are projected to the upper face of the IC 10 when the IC 10 is at the inspection position, thereby heating the IC 10.</p>
申请公布号 JP2001165994(A) 申请公布日期 2001.06.22
申请号 JP19990349925 申请日期 1999.12.09
申请人 SEIKO EPSON CORP 发明人 MAEDA MASAMI;FUJIMORI HIROAKI
分类号 H01L21/683;G01R31/26;H01L21/68;(IPC1-7):G01R31/26 主分类号 H01L21/683
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