发明名称 |
ELECTRONIC DEVICE HANDLER AND ELECTRONIC DEVICE INSPECTING APPARATUS |
摘要 |
<p>PROBLEM TO BE SOLVED: To eliminate the wiring of a heater wire to a contact hand and ensure stable heating of an inspection device through heating the device held by the contact hand and positioned at an inspection position in a noncontact manner. SOLUTION: An IC handler has the contact hand 1 for holding and positioning the IC 10 to the inspection position. An infrared ray irradiating device 8 for emitting infrared rays is arranged in the vicinity of the contact hand 1, in a state with the IC 10 positioned to the inspection position. A mirror 7 for changing the advance direction of infrared rays is incorporated in the contact hand 1. Infrared rays from the infrared irradiating device 8 are projected to the upper face of the IC 10 when the IC 10 is at the inspection position, thereby heating the IC 10.</p> |
申请公布号 |
JP2001165994(A) |
申请公布日期 |
2001.06.22 |
申请号 |
JP19990349925 |
申请日期 |
1999.12.09 |
申请人 |
SEIKO EPSON CORP |
发明人 |
MAEDA MASAMI;FUJIMORI HIROAKI |
分类号 |
H01L21/683;G01R31/26;H01L21/68;(IPC1-7):G01R31/26 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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