| 摘要 |
PROBLEM TO BE SOLVED: To provide an interference system for measuring the profile of surface or thickness of a measuring object. SOLUTION: This device comprises an infrared light source 12 of wide band containing a central wavelength of about 1μm or more during operation, a scanning interferometer 10 for turning a first infrared wave surface 22 to the direction fitted to a reference route and a second infrared wave surface 20 to the direction fitted to a measuring route where it is collided to a measuring object during operation, so that the wave surfaces are coupled after the second wave surface is collided to the measuring object 50 to form an optical interference pattern, the first and second infrared wave surfaces being obtained from the infrared emitted light of wide band; a detector 30 for forming a data in response to the optical interference pattern; and a controller for changing the optical path difference between the reference path and the measuring path and analyzing data as the function of the changing optical path different to determined the profile of the surface.
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