| 摘要 |
PROBLEM TO BE SOLVED: To provide a worktable device which prevents the inclination of the table attributable to the rotation of a ball screw and is compact at a low cost. SOLUTION: A table 22 and a slider 24 are guided to a same guide rail 21. The table 22 and the slider 24 are connected to each other via a connection part 26 with a static pressure part 27. When the ball screw 30 is rotated, the slider 24 is moved along the guide rail 21, and the movement of the slider 24 is transmitted to the table 22 via the connection part 26. The inclination of the slider 24 accompanied by the rotation of the ball screw 30 is absorbed by the connection part 26, but not transmitted to the table 22.
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