发明名称 METHOD OF RECOVERING QUARTZ CRUCIBLE AFTER GROWING SINGLE CRYSTAL AND DEVICE FOR GROWING CZ-SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method of recovering a quartz crucible from a carbon crucible without breaking the quartz crucible so as to reuse it and a device for growing a single crystal, which is capable of realizing the method mentioned above. SOLUTION: After growing a single crystal, a quartz crucible is separated from a carbon crucible by pressing the bottom part of the quartz crucible at >=800 deg.C during cooling in a vacuum chamber. A growing device having such structure that a supporting member capable of giving pressing force over a wide range of the bottom part of the quartz crucible is interposed between the carbon crucible and the quartz crucible and the supporting member can be lifted and lowered is used to realize such separation.
申请公布号 JP2001163697(A) 申请公布日期 2001.06.19
申请号 JP19990351908 申请日期 1999.12.10
申请人 SUMITOMO METAL IND LTD 发明人 KANDA TADASHI
分类号 H01L21/208;C30B15/10;C30B29/06;(IPC1-7):C30B15/10 主分类号 H01L21/208
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