APPARATUS FOR DETECTING WAFER CARRIER OF SEMICONDUCTOR EQUIPMENT

摘要

PURPOSE: An apparatus for detecting a wafer carrier of semiconductor equipment is provided to prevent an accident such as collision with a door of a load lock, by precisely detecting whether the wafer carrier is loaded. CONSTITUTION: A reflecting bar assembly(60) has the first and second carrier detecting units and the first and second reflecting bars(63,64). The first and second carrier detecting units detect lower end portions at both sides of a wafer carrier to be loaded in a load lock. The first and second reflecting bars are respectively connected to the first and second carrier detecting units. A light emitting unit emits light toward the first and second reflecting bars. A light-receiving unit receives the light reflected from the first and second reflecting bars. A control unit opens/closes a door of the loadlock depending on whether the light-receiving unit receives light.