| 摘要 |
PURPOSE: A field emission element and manufacturing method of the same are provided to simplify its structure and improve the uniformity of an electron to be emitted from a microtip. CONSTITUTION: A field emission element comprises a cathode electrode(52), a gate insulating layer(54) and a gate electrode(56), a resistance layer(57) and a microtip(58). The cathode electrode(52) is formed on a grass substrate or a silicone substrate. The gate insulating layer(54) and the gate electrode(56) are subsequently formed and have a gate hole. The resistance layer(57) and the microtip(58) is subsequently formed in the upper part of the cathode electrode within the gate hole. The preparing method comprises a step for forming subsequently the cathode electrode layer, the gate insulating layer(54) and the gate electrode layer on the grass or silicone substrate, a step for removing subsequently the gate electrode layer and the gate insulating layer(54) to have the gate hole such that the cathode electrode layer is exposed, a step for forming the separating layer such that the gate hole is separated from the gate electrode layer, a step for forming the resistance layer(57) in the upper part of the exposed cathode electrode(52) and separating layer, and a step for forming the microtip(58) in the resistance layer(57) formed within the gate hole.
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