SHAPE ACCURACY MEASURING DEVICE BY SEQUENTIAL TWO-POINT METHOD, AND METHOD FOR MEASURING SPACE BETWEEN LASER DISPLACEMENT METER FOR MEASURING SHAPE ACCURACY BY SEQUENTIAL TWO-POINT METHOD

摘要

PROBLEM TO BE SOLVED: To easily use a laser displacement meter in the measurement by the sequential two-point method. SOLUTION: This shape accuracy measuring device comprises a displacement meter holding member 3 to arrange two laser displacement meters 4 and 5 with a predetermined space therebetween along the extending direction of the measurement line set with respect to a table 1c, and hold the meters toward the table 1c with substantially equal distance from the table 1c, a machine tool body 1a to relatively move the displacement meter holding member 3 to the table 1c along the measurement line; a CCD 2 to successively detect the position of the laser beam from the laser displacement meters 4 and 5 irradiated on the table 1c according to the relative movement of the displacement meter holding member 3; and a control device 1b which takes in the output signals from the two laser displacement meters 4 and 5 every time the displacement meter holding member 3 is relatively moved by the distance equal to the space between the two laser displacement meters 4 and 5 obtained from the relative movement of the displacement meter holding member 3 until the position of the laser beam from the other laser displacement meter 5 agrees with the position of the laser beam from one laser displacement meter 4 on the table 1c according to the relative movement of the displacement meter holding member 3, and operates the output signals based on the sequential two-point method to obtain the straightness error curve of the table 1c.