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发明名称
摘要
申请公布号
JP3175333(B2)
申请公布日期
2001.06.11
申请号
JP19920250003
申请日期
1992.09.18
申请人
发明人
分类号
C23C14/56;C23C16/44;C23F4/00;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
C23C14/56
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代理人
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