发明名称 TEST AND REPAIR SYSTEM, PRODUCT FABRICATION SYSTEM, COMPONENT TEST SYSTEM, DATA PROCESSING SYSTEM, COMPONENT REPAIR SYSTEM, AND INFORMATION STORAGE MEDIUM
摘要 <p>PROBLEM TO BE SOLVED: To easily repair a defective part in a treating component mounted on a component carrying jig and carried. SOLUTION: When a defect is found at a part treating components mounted on a component carrying jig and is carried, a defective part can be repaired, while the objective component is mounted on the component carrying jig and while being carried. Then, it is not required that the defective component on the component carrying jig in normal work be taken out and put on a repairing component carrying jig. At the same time, control data exclusively for the repairing other than process state data for each component carrying jig need not be generated.</p>
申请公布号 JP2001155980(A) 申请公布日期 2001.06.08
申请号 JP19990334654 申请日期 1999.11.25
申请人 NEC CORP 发明人 SUGIKAWA HIROSHI
分类号 G01N21/956;G05B19/418;H01L21/02;H01L21/66;(IPC1-7):H01L21/02 主分类号 G01N21/956
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