DIELECTRIC BARRIER EXCIMER LAMP

摘要

PROBLEM TO BE SOLVED: To improve a radiation efficiency of an ultraviolet rays with regard to power injected into an excimer lamp. SOLUTION: The invention comprises a double tube 12 constituted by sealing gas for discharging an excimer gas lamp into space between an inner tube and a translucent outer tube, a case 11 accommodating the double tube 12 and opening its one side in the diameter direction of the at least double tube and an outer electrode 14 fixed into the opened region of the case 11. The outer electrode 14 comprises a region in the form of net closely arranged to the outer surface of the outer tube in one side of the double tube 12. The invention comprises an inner electrode 13 arranged into an inner side of the inner tube corresponding to the region into which the outer electrode 14 is closely arranged. There is radiated an ultraviolet rays from the outer electrode in the form of net by applying voltage between the outer electrode 14 and the inner electrode 13.